PolySilane (silicon based material) / Fine Materials Business

Optical patterning grade OGSOL SI-10 series

  • When separated by UV radiation, this material shows the patterning of different physical properties between the exposed part and the unexposed part.
  • The refractive index is as high as about 1.70.
  • The basic structure of this series is polymethyl phenylsilane (PMPS) and, in addition, it is denatured in a unique way to improve solubility and compatibility with other materials.

Basic structure

PMPS 

Changes in physical properties caused by UV radiation (SI-10-10)

Characteristics Unexposed part Exposed part
Refractive index (589 nm) 1.70 1.60
Contact angle of water (°) 90 85

Example of usage

  • Optical waveguide
  • Special photoresist
  • Transparent overcoat

Changes in absorption spectra caused by UV radiation (SI-10-10)

Changes in absorption spectra caused by UV radiation (SI-10-10) Image 

Physical properties (representative properties)

Grade SI-10-10 SI-10-20
Characteristics
  • Standard polysilane
  • Good solubility
  • High sensitivity
  • Thermosetting with other reactive compounds is possible.
Molecular weight Mn 5600 1100
Mw 22100 1800
Thin film physical properties Refractive index (589 nm) 1.7 1.71
Dielectric constant (10 kHz) 2.7
Dielectric loss tangent (10 kHz) 0.0008
Solubility (20 wt%) PGMEA
MEK
Ethyl lactate × ×
c-hexanone
PGME × ×
Butyl acetate
i-propanol × ×
NMP
THF
Xylene
Toluene
Anisole
Cellosolve acetate
MIKB ×
Dichloromethane
Monochlorobenzene

◎ : Completely dissolved  ○ : Dissolved  △ : Dissolved a little  × : Not dissolved

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